Anti-Plasma Zirconia
For Ceramic Parts Used in a Plasma Environment
Plasma dry etching is an essential process in highly integrated semiconductor circuit fabrication. Fluorocarbon gases, such as CF4, are commonly used in this process; however, these gases etch the components of plasma chambers, leading to equipment damage and increased component replacement frequency.
The selection of erosion-resistant chamber materials is therefore crucial, with materials like Al2O3 being commonly used. Recently, there has been a shift towards materials with lower etching rates, such as Y2O3.
However, Y2O3 is more brittle and exhibits inferior mechanical properties compared to Al2O3, resulting in shorter component lifespans. To enhance productivity in the semiconductor industry, it is critical to explore new materials that offer both low etching rates and strong mechanical properties.
DKK has introduced yttria-stabilized zirconia materials, HSY-0130, for ceramics, which demonstrate superior bending strength and fracture toughness compared to Y2O3. Additionally, HSY-0130 exhibits a lower etching rate than traditional plasma-resistant materials like Al2O3. With its excellent mechanical properties, DKK’s materials for ceramics are highly beneficial for the maintenance of plasma chamber equipment, offering a promising solution for the semiconductor industry.
About DKK
DKK America Materials, Inc. (“DKA”) is the wholly-owned U.S. subsidiary of Daiichi Kigenso Kagaku Kogyo Co., Ltd. (“DKK”). DKK America Materials, Inc. (“DKA”) maximizes the potential of zirconium compounds.
As a dedicated zirconium compound manufacturer, our unique technologies maximize the potential of zirconium properties. Our zirconium compounds and materials have many applications that advance technology and safety.
Applications Include:
● Industrial Catalysts
● Dental Materials
● Automotive Catalysts
● Electronic Materials
● Fine Ceramics
● Fuel Cells
● Oxygen Sensors
● Semiconductors
Get in contact with us!
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DKK America Materials, Inc., 19500 Victor Parkway, Suite #290, Livonia, Michigan 48152 U.S.A.
TEL: +1(734) 743-2440